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Multi-layer Alignment

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@demisjohn demisjohn released this 08 May 23:45
· 69 commits to master since this release

This release enables the following:

  • Multi-layer alignment (global and optical)
  • Alignment mark exposures
  • Pre-defined image libraries (implemented for alignment mark Image definitions)

The new "Example02" file has been tested by exposing a wafer on our system, and performing 2nd layer alignment/exposure.