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... Measurement Tools/MScopeCals - custom function example/JEOL SEM - etched sidewall 01.txt
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$SEM_DATA_VERSION 1 | ||
$CM_SIGNAL_NAME SEI | ||
$$SM_ADD_IMAGE | ||
$$SM_ADD_CHECKED_CH 1 | ||
$$ADD_CH1_SIGNAL SEI | ||
$$ADD_CH2_SIGNAL SEI | ||
$$ADD_CH3_SIGNAL SEI | ||
$$ADD_CH4_SIGNAL SEI | ||
$CM_CONTRAST 2390 | ||
$CM_BRIGHTNESS 544 | ||
$$SM_MIX_IMAGE | ||
$CM_ACCEL_VOLT 1.00 | ||
$SM_ARRIVAL_EMI 0.00 | ||
$SM_GB_GUN_VOLT 3.00 | ||
$SM_GB_BIAS_VOLT 2.00 | ||
$$SM_WD 2.77 | ||
$CM_MAG 50000 | ||
$$SM_COLUMN_MODE GB_HIGH | ||
$$SM_OL_APERTURE 9 | ||
$$SM_CL_COARSE 14 | ||
$$SM_CL_FINE 25 | ||
$$SM_GUN_ALI_TILT 0 0 | ||
$$SM_CL_STIG 0 0 | ||
$$SM_OL_STIG 68 162 | ||
$$SM_OL_STIG_CENTER 0 0 0 0 | ||
$$SM_OLAP_ALI 0 0 | ||
$$SM_PROBE_NO 6 | ||
$$SM_PROBE_FINE 25 | ||
$$SM_ACL_ALI -2 -1 | ||
$$SM_COLUMN_CENTER 0 0 | ||
$$SM_EF_ALI 0 0 | ||
$$SM_SCAN_ROTATION 298.80 | ||
$$SM_WD_CORRECT 0 | ||
$$SM_INTEG_NO 1 | ||
$$CM_SCAN_MODE 3 | ||
$$CM_SCAN_SPEED 9 | ||
$$CM_INSTRUMENT_SCAN_SPEED 9 | ||
$$SM_R_FILTER_MODE 0 | ||
$$SM_SEI_COLLECTOR 0 | ||
$$SM_R_FILTER_INDEX 101 | ||
$$SM_DET_SE1_MODE_NUMBER 0 | ||
$$SM_DET_TTL_MODE_NUMBER 0 | ||
$$SM_DET_SE2_MODE_NUMBER 0 | ||
$$SM_TTL_COLLECTOR_VOLTAGE 0.00 | ||
$$SM_SED_FILTER_MODE 0 | ||
$$SM_UED_FILTER_MODE 0 | ||
$$SM_UED_FILTER_VALUE 0.00 | ||
$$SM_ACB_MODE 1 | ||
$$SM_ACB_CONTRAST 3.36 | ||
$$SM_ACB_BRIGHTNESS -5.54 | ||
$CM_SIGNAL SEI | ||
$CM_STAGE_POS -0.169 1.289 7.4 360.0 0.0 0 | ||
$SM_EMI_CURRENT 46.20 | ||
$$SM_PROBE_CURRENT 0.00 | ||
$SM_PENNING_VAC 9.634e-005 | ||
$SM_PRESSURE_AT_LOW_VACUUM 0.000 | ||
$SM_VACUUM_MODE_FOR_SPECIMEN_CHAMBER 0 | ||
$CM_FORMAT JEOL-SEM | ||
$CM_VERSION 1.0 | ||
$CM_COMMENT | ||
$CM_DATE 2010/10/01 | ||
$CM_TIME 08:44:19 | ||
$CM_OPERATOR Blumenthal | ||
$CM_INSTRUMENT 7600F | ||
$$SM_MICRON_BAR 53 | ||
$$SM_MICRON_MARKER 100nm | ||
$CM_FRAME_SIZE 0 0 | ||
$CM_TITLE JEOL SEM - etched sidewall 01 | ||
$CM_LABEL OCPN | ||
$CM_OFFSET 0 0 | ||
$CM_FULL_SIZE 1280 960 | ||
$AN_CURSOR_MEAS_TYPE 0 | ||
$AN_EXPORT_MODE 1 | ||
$CM_COLOR_MODE 0 | ||
$AN_ANNOTATION_MODE 1 | ||
$AN_CURSOR_MEAS $AN_LINE%0 $AN_LINE%1 $AN_LINE%2 $AN_LINE%3 $AN_TEXT%0 $AN_TEXT%1 $AN_TEXT%2 | ||
$AN_LINE%0 440.00000000 0.00000000 440.00000000 959.00000000 65280 1.00000000 0 0 | ||
$AN_LINE%1 840.00000000 0.00000000 840.00000000 959.00000000 65280 1.00000000 0 0 | ||
$AN_LINE%2 0.00000000 280.00000000 1279.00000000 280.00000000 65280 1.00000000 0 0 | ||
$AN_LINE%3 0.00000000 680.00000000 1279.00000000 680.00000000 65280 1.00000000 0 0 | ||
$AN_TEXT%0 5.00000000 874.00000000 215.00000000 910.00000000 "X:" "Courier New" 0 32.00000000 16777215 65793 1 0 | ||
$AN_TEXT%1 220.00000000 874.00000000 430.00000000 910.00000000 "Y:" "Courier New" 0 32.00000000 16777215 65793 1 0 | ||
$AN_TEXT%2 435.00000000 874.00000000 645.00000000 910.00000000 "D:" "Courier New" 0 32.00000000 16777215 65793 1 0 |