aureo_with_soi.proc

assume microns
temperature 25
geometry scaling 1

define SOI2 = l17t0+l17t14+l17t15+l17t251
define POLY2 = l16t0+l16t14+l16t15+l16t251
define NITRIDE2 = grow(POLY2, -0.15um)
define LOWMETAL2 = l15t0+l15t14+l15t15+l15t251
define VIALOWMETAL2SOI2 = LOWMETAL2*SOI2
define HIGHMETAL2 = l14t0+l14t14+l14t15+l14t251
define VIAHIGHMETAL2POLY2 = HIGHMETAL2*POLY2
define VIAHIGHMETAL2LOWMETAL2 = HIGHMETAL2*LOWMETAL2
define HIGHMETAL1 = l13t0+l13t14+l13t15+l13t251
define VIAHIGHMETAL1HIGHMETAL2 = HIGHMETAL1*HIGHMETAL2
define LOWMETAL1 = l12t0+l12t14+l12t15+l12t251
define VIALOWMETAL1HIGHMETAL1 = LOWMETAL1*HIGHMETAL1
define POLY1 = l11t0+l11t14+l11t15+l11t251
define VIAPOLY1HIGHMETAL1 = POLY1*HIGHMETAL1
define NITRIDE1 = grow(POLY1, -0.15um)
define SOI1 = l9t0+l9t14+l9t15+l9t251
define VIASOI1LOWMETAL1 = SOI1*LOWMETAL1

layer 1000 1.0 1 # Air
layer 85 1.0 1 1e-12 ohm-cm
  conductor 40.0 10.0 ohm-cm SOI1
  offset 40.0
  offset 0.001
  conductor 0.999 2.44e-8 ohm-cm LOWMETAL1
  offset 0.499
  conductor 1.0 1.0 ohm-cm POLY1
  offset 1.0
  offset 0.001
  conductor 0.998 2.44e-8 ohm-cm HIGHMETAL1
  offset 0.999
  offset 0.001
  conductor 0.998 2.44e-8 ohm-cm HIGHMETAL2
  offset 0.999
  conductor 1.0 1.0 ohm-cm POLY2
  offset 0.5
  conductor 0.999 2.44e-8 ohm-cm LOWMETAL2
  offset 0.5
  offset 0.5
  conductor 40.0 10.0 ohm-cm SOI2
layer infinity 1.0

via SOI1 POLY1 10 ohm-cm NITRIDE1
via SOI1 LOWMETAL1 2.44e-8 ohm-cm VIASOI1LOWMETAL1
via LOWMETAL1 HIGHMETAL1 2.44e-8 ohm-cm VIALOWMETAL1HIGHMETAL1
via POLY1 HIGHMETAL1 2.44e-8 ohm-cm VIAPOLY1HIGHMETAL1
via HIGHMETAL1 HIGHMETAL2 2.44e-8 ohm-cm VIAHIGHMETAL1HIGHMETAL2
via HIGHMETAL2 POLY2 2.44e-8 ohm-cm VIAHIGHMETAL2POLY2
via HIGHMETAL2 LOWMETAL2 2.44e-8 ohm-cm VIAHIGHMETAL2LOWMETAL2
via LOWMETAL2 SOI2 2.44e-8 ohm-cm VIALOWMETAL2SOI2
via POLY2 SOI2 10 ohm-cm NITRIDE2